Inventor
YEH HSIAO-WEI
TW7 patents
⚠️ This page may combine multiple inventors who share the name “YEH HSIAO-WEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS8039195B2Oct 18, 2011
Si device making method by using a novel material for packing and unpacking process
TAIWAN SEMICONDUCTOR MFG4 citations61
US9323155B2Apr 26, 2016
Double patterning strategy for contact hole and trench in photolithography
TAIWAN SEMICONDUCTOR MFG1 citations51
US8029969B2Oct 4, 2011
Material and method for photolithography
TAIWAN SEMICONDUCTOR MFG0 citations51
US7777184B2Aug 17, 2010
Method for photoresist characterization and analysis
TAIWAN SEMICONDUCTOR MFG0 citations50