Inventor
ANTRACK TORSTEN
DE4 patents
Patents
4 patentsUS5524354AJun 11, 1996
Probe element for coordinate measurement systems
ZEISS CARL JENA GMBH27 citations86
US6674057B1Jan 6, 2004
Optical near-field microscope
ZEISS CARL JENA GMBH11 citations66
US6545263B2Apr 8, 2003
Scanning probe microscope with probe integrated in an optical system
ZEISS CARL JENA GMBH5 citations60
US10877286B2Dec 29, 2020
Multi-way prism
ZEISS CARL JENA GMBH0 citations37