Inventor

SHIONAGA KEISHI

JP3 patents

⚠️ This page may combine multiple inventors who share the name “SHIONAGA KEISHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US9857124B2Jan 2, 2018

Clamp apparatus, substrate carry-in/out apparatus using the same, and substrate processing apparatus

TOKYO ELECTRON LTD4 citations71

US12428242B2Sep 30, 2025

Information processing apparatus, transfer position correction method, and substrate processing apparatus

TOKYO ELECTRON LTD0 citations46

KANEKO HIROFUMI

1 patent

US8216378B2Jul 10, 2012

Reaction tube and heat processing apparatus for a semiconductor process

KANEKO HIROFUMI0 citations38