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Inventor
CHO BYUNG SUP
KR
2 patents
⚠️ This page may combine multiple inventors who share the name “CHO BYUNG SUP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LG SEMICON CO LTD
1 patent
US5975108A
Nov 2, 1999
Automatic drain collecting and exhausting apparatus for semiconductor fabrication system
LG SEMICON CO LTD
13 citations
63
HYNIX SEMICONDUCTOR INC
1 patent
US7764368B2
Jul 27, 2010
Method and apparatus for inspecting defects on mask
HYNIX SEMICONDUCTOR INC
0 citations
47