Inventor
NODA TOMONOBU
JP7 patents
Patents
7 patentsUS7973281B2Jul 5, 2011
Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus
TOSHIBA KK57 citations96
US7573066B2Aug 11, 2009
Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus
TOSHIBA KK59 citations96
US7221991B2May 22, 2007
System and method for monitoring manufacturing apparatuses
TOSHIBA KK24 citations92
US6671861B2Dec 30, 2003
Manufacturing process evaluation method for semiconductor device and pattern shape evaluation apparatus using the evaluation method
TOSHIBA KK9 citations71
US6583870B2Jun 24, 2003
Simulated defective wafer and pattern defect inspection recipe preparing method
TOSHIBA KK11 citations71
US6657735B2Dec 2, 2003
Method of evaluating critical locations on a semiconductor apparatus pattern
TOSHIBA KK3 citations61
US6711733B2Mar 23, 2004
System for and method of evaluating mask patterns
TOSHIBA KK5 citations60