Inventor

KOZAKI HISAKI

JP2 patents

Patents

2 patents

US7973281B2Jul 5, 2011

Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus

TOSHIBA KK57 citations96

US7573066B2Aug 11, 2009

Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus

TOSHIBA KK59 citations96