Inventor
PARK JONGBIN
KR5 patents
⚠️ This page may combine multiple inventors who share the name “PARK JONGBIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
4 patentsUS11711883B2Jul 25, 2023
Droplet accelerating assembly and extreme ultra-violet lithography apparatus including the same
SAMSUNG ELECTRONICS CO LTD1 citations61
US11048179B2Jun 29, 2021
Apparatus for removing residues from source vessel
SAMSUNG ELECTRONICS CO LTD1 citations61
US11822260B2Nov 21, 2023
Apparatus for removing residue of EUV light source vessel
SAMSUNG ELECTRONICS CO LTD0 citations60
US12487532B2Dec 2, 2025
EUV collector inspection apparatus and inspection method
SAMSUNG ELECTRONICS CO LTD0 citations55