Inventor
VAN NUTT CHARLES
US4 patents
⚠️ This page may combine multiple inventors who share the name “VAN NUTT CHARLES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MATERIALS RESEARCH CORP
3 patentsUS5126028AJun 30, 1992
Sputter coating process control method and apparatus
MATERIALS RESEARCH CORP177 citations96
US4957605ASep 18, 1990
Method and apparatus for sputter coating stepped wafers
MATERIALS RESEARCH CORP118 citations95
US5174875ADec 29, 1992
Method of enhancing the performance of a magnetron sputtering target
MATERIALS RESEARCH CORP53 citations90