Inventor
FRANKEL ROBERT D
US11 patents
⚠️ This page may combine multiple inventors who share the name “FRANKEL ROBERT D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HAMPSHIRE INSTR INC
7 patentsUS4872189AOct 3, 1989
Target structure for x-ray lithography system
HAMPSHIRE INSTR INC58 citations92
US4896341AJan 23, 1990
Long life X-ray source target
HAMPSHIRE INSTR INC23 citations91
US4870668ASep 26, 1989
Gap sensing/adjustment apparatus and method for a lithography machine
HAMPSHIRE INSTR INC61 citations91
US4700371AOct 13, 1987
Long life x-ray source target
HAMPSHIRE INSTR INC44 citations91
US4734923AMar 29, 1988
Lithographic system mask inspection device
HAMPSHIRE INSTR INC47 citations89
US4837793AJun 6, 1989
Mass limited target
HAMPSHIRE INSTR INC8 citations69
US4860328AAug 22, 1989
Target positioning for minimum debris
HAMPSHIRE INSTR INC17 citations66
FRANKEL ROBERT D
3 patentsUS6506342B1Jan 14, 2003
Tracking apparatus and method for use with combinatorial synthesis processes
FRANKEL ROBERT D185 citations97
US8432543B2Apr 30, 2013
Method and system for raman, fluorescence, lithographic, stimulated emission and photochemical imaging beyond the diffraction limit
FRANKEL ROBERT D6 citations71
US8432546B2Apr 30, 2013
Method and system for stimulated Raman microscopy beyond the diffraction limit
FRANKEL ROBERT D1 citations50