Inventor
BAGLEY WILLIAM A
US7 patents
⚠️ This page may combine multiple inventors who share the name “BAGLEY WILLIAM A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
6 patentsUS7270713B2Sep 18, 2007
Tunable gas distribution plate assembly
APPLIED MATERIALS INC124 citations97
US6528767B2Mar 4, 2003
Pre-heating and load lock pedestal material for high temperature CVD liquid crystal and flat panel display applications
APPLIED MATERIALS INC561 citations95
US7440091B2Oct 21, 2008
Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
APPLIED MATERIALS INC16 citations89
US6510888B1Jan 28, 2003
Substrate support and method of fabricating the same
APPLIED MATERIALS INC13 citations82
US6924462B2Aug 2, 2005
Pedestal for flat panel display applications
APPLIED MATERIALS INC5 citations70
US7834994B2Nov 16, 2010
Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate
APPLIED MATERIALS INC2 citations60