Inventor

NAKAMOTO NAOYUKI

JP4 patents

⚠️ This page may combine multiple inventors who share the name “NAKAMOTO NAOYUKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AIR LIQUIDE

3 patents

US7334708B2Feb 26, 2008

Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical

AIR LIQUIDE24 citations88

US8348248B2Jan 8, 2013

Bubbling supply system for stable precursor supply

AIR LIQUIDE4 citations61

US8365779B2Feb 5, 2013

Liquid quantity measuring apparatus, liquid quantity measuring method and method for supplying quantitively supplying liquid material

AIR LIQUIDE3 citations56

NAKAGAWA TOSHIYUKI

1 patent

US9062996B2Jun 23, 2015

Device for supplying the liquid material inside a filling container and method of controlling the liquid level inside the filling container for said liquid material supply device

NAKAGAWA TOSHIYUKI3 citations54