Inventor

NEFF JAKOB WILLI

BE5 patents

⚠️ This page may combine multiple inventors who share the name “NEFF JAKOB WILLI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KONINKL PHILIPS ELECTRONICS NV

2 patents

US7630475B2Dec 8, 2009

Gas discharge source, in particular for EUV radiation

KONINKL PHILIPS ELECTRONICS NV8 citations79

US7897948B2Mar 1, 2011

EUV plasma discharge lamp with conveyor belt electrodes

KONINKL PHILIPS ELECTRONICS NV6 citations59

NEFF JAKOB WILLI

2 patents

US8519368B2Aug 27, 2013

Method and device for generating EUV radiation or soft X-rays

NEFF JAKOB WILLI2 citations56

US8227779B2Jul 24, 2012

Gas discharge source for generating EUV-radiation

NEFF JAKOB WILLI4 citations56

LOEKEN MICHAEL

1 patent

US8227777B2Jul 24, 2012

Method and apparatus for operating an electrical discharge device

LOEKEN MICHAEL2 citations51