Inventor

SAWAI KAZUO

JP4 patents

⚠️ This page may combine multiple inventors who share the name “SAWAI KAZUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

2 patents

US7960078B2Jun 14, 2011

Exposure condition setting method, substrate processing device, and computer program

TOKYO ELECTRON LTD6 citations69

US8007968B2Aug 30, 2011

Substrate processing method, program, computer-readable storage medium and substrate processing system

TOKYO ELECTRON LTD5 citations60

TANAKA KEISUKE

1 patent

US9396911B2Jul 19, 2016

Determination method, control method, determination apparatus, pattern forming system and program

TANAKA KEISUKE2 citations58

SAWAI KAZUO

1 patent

US8500950B2Aug 6, 2013

Exposure condition setting method, substrate processing apparatus, and computer program

SAWAI KAZUO2 citations52