Inventor

SONODA AKIHIRO

JP6 patents

⚠️ This page may combine multiple inventors who share the name “SONODA AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OKI ELECTRIC IND CO LTD

3 patents

US6432727B1Aug 13, 2002

Method for eliminating a static electricity on a semiconductor wafer

OKI ELECTRIC IND CO LTD10 citations70

US6909587B2Jun 21, 2005

Apparatus having a static eliminator for manufacturing semiconductor devices and a method for eliminating a static electricity on a semiconductor wafer

OKI ELECTRIC IND CO LTD2 citations59

US6440614B1Aug 27, 2002

Mask and method of manufacturing semiconductor device

OKI ELECTRIC IND CO LTD3 citations59

STARTING IND

1 patent

US4738085AApr 19, 1988

Rotary cutter for mowers

STARTING IND27 citations91

TOKYO ELECTRON LTD

1 patent

US7960078B2Jun 14, 2011

Exposure condition setting method, substrate processing device, and computer program

TOKYO ELECTRON LTD6 citations69

SAWAI KAZUO

1 patent

US8500950B2Aug 6, 2013

Exposure condition setting method, substrate processing apparatus, and computer program

SAWAI KAZUO2 citations52