Inventor

AKIMOTO HIROTAKA

JP3 patents

⚠️ This page may combine multiple inventors who share the name “AKIMOTO HIROTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IWANO TOMOHIRO

2 patents

US9982177B2May 29, 2018

Slurry, polishing fluid set, polishing fluid, and substrate polishing method using same

IWANO TOMOHIRO6 citations81

US9039796B2May 26, 2015

Method for producing abrasive grains, method for producing slurry, and method for producing polishing liquid

IWANO TOMOHIRO1 citations48

HITACHI CHEMICAL CO LTD

1 patent

US10703947B2Jul 7, 2020

Slurry, polishing fluid set, polishing fluid, and substrate polishing method using same

HITACHI CHEMICAL CO LTD0 citations49