Inventor
NINH PHUC HONG
JP3 patents
Patents
3 patentsUS10620648B2Apr 14, 2020
Substrate processing apparatus
ASM IP HOLDING BV0 citations46
US10345832B1Jul 9, 2019
Insulation system and substrate processing apparatus
ASM IP HOLDING BV0 citations46
US10521774B2Dec 31, 2019
Preventive maintenance system and preventive maintenance method
ASM IP HOLDING BV0 citations36