Inventor

HUANG GUO-TSAI

TW6 patents

⚠️ This page may combine multiple inventors who share the name “HUANG GUO-TSAI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HUANG GUO-TSAI

2 patents

US8329360B2Dec 11, 2012

Method and apparatus of providing overlay

HUANG GUO-TSAI4 citations59

US9097978B2Aug 4, 2015

Method and apparatus to characterize photolithography lens quality

HUANG GUO-TSAI3 citations58

LIN JYUH-FUH

1 patent

US8755045B2Jun 17, 2014

Detecting method for forming semiconductor device

LIN JYUH-FUH15 citations78

TAIWAN SEMICONDUCTOR MFG

1 patent

US8592107B2Nov 26, 2013

Method and apparatus of providing overlay

TAIWAN SEMICONDUCTOR MFG0 citations51

TAIWAN SEMICONDUCTOR MFG CO LTD

1 patent

US9594309B2Mar 14, 2017

Method and apparatus to characterize photolithography lens quality

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations50

CHEN YUNG-YU

1 patent

US7350416B2Apr 1, 2008

Method for determining properties of a film, and apparatus for realizing the method

CHEN YUNG-YU0 citations32