Inventor

FLAIM TONY

US4 patents

⚠️ This page may combine multiple inventors who share the name “FLAIM TONY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BREWER SCIENCE INC

2 patents

US5281690AJan 25, 1994

Base-soluble polyimide release layers for use in microlithographic processing

BREWER SCIENCE INC62 citations93

US5234990AAug 10, 1993

Polymers with intrinsic light-absorbing properties for anti-reflective coating applications in deep ultraviolet microlithography

BREWER SCIENCE INC61 citations93

FLAIM TONY

1 patent

US5057399AOct 15, 1991

Method for making polyimide microlithographic compositions soluble in alkaline media

FLAIM TONY40 citations87

(unassigned)

1 patent

US5578676ANov 26, 1996

Method for making polymers with intrinsic light-absorbing properties

16 citations69