Inventor

TANI YASUHISA

JP2 patents

⚠️ This page may combine multiple inventors who share the name “TANI YASUHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIKON CORP

1 patent

US8035797B2Oct 11, 2011

Projection exposure apparatus, cleaning and maintenance methods of a projection exposure apparatus, and device manufacturing method

NIKON CORP6 citations63

TANI YASUHISA

1 patent

US8724076B2May 13, 2014

Projection exposure apparatus, cleaning and maintenance methods of a projection exposure apparatus, and device manufacturing method

TANI YASUHISA0 citations39