Inventor
SHIOZAWA MASAKI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SHIOZAWA MASAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NIKON CORP
6 patentsUS6061174AMay 9, 2000
Image-focusing optical system for ultraviolet laser
NIKON CORP32 citations92
US6377332B1Apr 23, 2002
Optical member for photolithography and photolithography apparatus
NIKON CORP28 citations91
US6226128B1May 1, 2001
Light-transmitting optical member, manufacturing method thereof, evaluation method therefor, and optical lithography apparatus using the optical member
NIKON CORP25 citations90
US5978070ANov 2, 1999
Projection exposure apparatus
NIKON CORP15 citations72
US6320700B2Nov 20, 2001
Light-transmitting optical member, manufacturing method thereof, evaluation method therefor, and optical lithography apparatus using the optical member
NIKON CORP14 citations71
US7940309B2May 10, 2011
Optical low pass filter and image-capturing device
NIKON CORP0 citations40