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Inventor
BERKMAN VITALY J
US
2 patents
⚠️ This page may combine multiple inventors who share the name “BERKMAN VITALY J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BERKMAN VITALY J
1 patent
US8480862B2
Jul 9, 2013
Ozone system for multi-chamber tools
BERKMAN VITALY J
2 citations
51
MKS INSTR INC
1 patent
US7892502B2
Feb 22, 2011
Ozone system for multi-chamber tools
MKS INSTR INC
1 citations
46