Inventor

SIM KWANG-BO

KR2 patents

Patents

2 patents

US9583371B2Feb 28, 2017

Electrostatic chuck and apparatus for processing a substrate including the same

SAMSUNG ELECTRONICS CO LTD2 citations65

US7352050B2Apr 1, 2008

Fuse region of a semiconductor region

SAMSUNG ELECTRONICS CO LTD0 citations44