Inventor
TOKEI ZSOLT
BE10 patents
Patents
10 patentsUS9859161B2Jan 2, 2018
Self-aligned interconnects
IMEC VZW3 citations71
US11005016B2May 11, 2021
Apex angle reduction in a LED device with a LED array
IMEC VZW2 citations70
US11342261B2May 24, 2022
Integrated circuit with an interconnection system having a multilevel layer providing multilevel routing tracks and method of manufacturing the same
IMEC VZW0 citations61
US11270912B2Mar 8, 2022
Method for forming a via hole self-aligned with a metal block on a substrate
IMEC VZW0 citations51
US9553586B2Jan 24, 2017
Filed programmable gate array device with programmable interconnect in back end of line portion of the device
IMEC VZW1 citations49
US11088070B2Aug 10, 2021
Method of forming a multi-level interconnect structure in a semiconductor device
IMEC VZW0 citations48
US12431389B2Sep 30, 2025
Superconductive interconnect structure
IMEC VZW0 citations47
US11264271B2Mar 1, 2022
Semiconductor fabrication method for producing nano-scaled electrically conductive lines
IMEC VZW0 citations47
US9997458B2Jun 12, 2018
Method for manufacturing germamde interconnect structures and corresponding interconnect structures
IMEC VZW0 citations47
US10395978B2Aug 27, 2019
Method of patterning target layer
IMEC VZW0 citations45