Inventor
FLOTGEN CHRISTOPH
AT6 patents
Patents
6 patentsUS9899223B2Feb 20, 2018
Apparatus and method for bonding substrates including changing a stoichiometry of oxide layers formed on the substrates
EV GROUP E THALLNER GMBH6 citations81
US11139170B2Oct 5, 2021
Apparatus and method for bonding substrates
EV GROUP E THALLNER GMBH0 citations60
US11270902B2Mar 8, 2022
Electrostatic substrate holder
EV GROUP E THALLNER GMBH0 citations57
US10083933B2Sep 25, 2018
Method for permanent bonding of wafers
EV GROUP E THALLNER GMBH0 citations50
US10438798B2Oct 8, 2019
Apparatus and method for bonding substrates
EV GROUP E THALLNER GMBH0 citations49
US10707059B2Jul 7, 2020
Method and device for plasma treatment of substrates
EV GROUP E THALLNER GMBH0 citations32