Inventor

BAEK KYE-HYUN

KR18 patents

⚠️ This page may combine multiple inventors who share the name “BAEK KYE-HYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BAEK KYE-HYUN

SAMSUNG ELECTRONICS CO LTD

Process-parameter prognostic system for predicting shape of semiconductor structure, semiconductor fabrication apparatus having the system, and method of using the apparatus

Integrated circuit device and method of forming the same

Semiconductor device including non-active fins and separation regions

Integrated circuit device and method of forming the same

Method of manufacturing an integrated circuit device including a fin-type active region

Integrated circuit device including an overhanging hard mask layer

Electrostatic chuck assemblies capable of bidirectional flow of coolant and semiconductor fabricating apparatus having the same

Substrate processing system, method of managing the same and method of manufacturing semiconductor device with the same

Methods and systems for managing semiconductor manufacturing equipment

MICRON TECHNOLOGY INC

Electronic devices comprising memory pillars and dummy pillars including an oxide material, and related systems and methods

Electronic devices comprising memory pillars and dummy pillars including an oxide material, and related systems and methods

Microelectronic devices including tiered stacks including conductive structures isolated by slot structures, and related electronic systems and methods

BAEK KYE HYUN

Equipment for manufacturing semiconductor device and seasoning process method of the same

LEE HO-KI

Method of controlling semiconductor process distribution

HYNIX SEMICONDUCTOR INC

Method for minimizing variation in etch rate of semiconductor wafer caused by variation in mask pattern density

BAEK KYE-HYUN

Method of using process-parameter prognostic system for predicting shape of semiconductor structure

PARK SANG-WUK

Etching system and method of controlling etching process condition

PARK SANGWUK

Methods for optimizing a plasma process