Inventor
MIN GYUNG-JIN
KR15 patents
⚠️ This page may combine multiple inventors who share the name “MIN GYUNG-JIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
11 patentsUS6885052B2Apr 26, 2005
Semiconductor memory device having self-aligned contacts and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD17 citations92
US6350642B1Feb 26, 2002
Method of manufacturing semiconductor memory device including various contact studs
SAMSUNG ELECTRONICS CO LTD17 citations80
US9607853B2Mar 28, 2017
Patterning method using metal mask and method of fabricating semiconductor device including the same patterning method
SAMSUNG ELECTRONICS CO LTD6 citations73
US7132708B2Nov 7, 2006
Semiconductor memory device having self-aligned contacts and method of fabricating the same
SAMSUNG ELECTRONICS CO LTD6 citations73
US6479399B2Nov 12, 2002
Method of forming interlevel dielectric layer of semiconductor device
SAMSUNG ELECTRONICS CO LTD8 citations73
US6333219B1Dec 25, 2001
Method for forming a polysilicon node in a semiconductor device
SAMSUNG ELECTRONICS CO LTD14 citations73
US9412610B2Aug 9, 2016
Semiconductor devices and methods of manufacturing the same
SAMSUNG ELECTRONICS CO LTD3 citations70
US6777341B2Aug 17, 2004
Method of forming a self-aligned contact, and method of fabricating a semiconductor device having a self-aligned contact
SAMSUNG ELECTRONICS CO LTD5 citations63
US7307703B2Dec 11, 2007
Methods of determining an etching end point based on compensation for etching disturbances
SAMSUNG ELECTRONICS CO LTD0 citations50
US9772296B2Sep 26, 2017
Method of inspecting a surface of a substrate and apparatus for performing the same
SAMSUNG ELECTRONICS CO LTD1 citations47
US9230808B2Jan 5, 2016
Method of fabricating semiconductor device using photo key
SAMSUNG ELECTRONICS CO LTD0 citations40