Inventor
JEON PYOJIN
KR2 patents
Patents
2 patentsUS11742222B2Aug 29, 2023
Apparatus for removing a photoresist and apparatus for manufacturing a comiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations57
US11545373B2Jan 3, 2023
Apparatus for removing a photoresist and apparatus for manufacturing a semiconductor device
SAMSUNG ELECTRONICS CO LTD0 citations57