Inventor
YAMANASHI HIROMASA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “YAMANASHI HIROMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
3 patentsUS7655907B2Feb 2, 2010
Charged particle beam apparatus and pattern measuring method
HITACHI HIGH TECH CORP12 citations83
US7679056B2Mar 16, 2010
Metrology system of fine pattern for process control by charged particle beam
HITACHI HIGH TECH CORP4 citations62
US8026482B2Sep 27, 2011
Charged particle beam apparatus and control method therefor
HITACHI HIGH TECH CORP0 citations40