Inventor

OHASHI TAKEYOSHI

JP20 patents

⚠️ This page may combine multiple inventors who share the name “OHASHI TAKEYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OHASHI TAKEYOSHI

HITACHI HIGH TECH CORP

Charged particle beam system

Scanning electron microscope

Electron beam equipment

Aberration corrector and charged particle beam apparatus using the same

Scanning electron microscope and method for measuring pattern

Inspection system, image processing device and inspection method

Aberration correction method, aberration correction system, and charged particle beam apparatus

Measuring method, data processing apparatus and electron microscope using same

Electron microscope and method of adjusting focus of electron microscope

Charged-particle beam device

Measurement method, image processing device, and charged particle beam apparatus

Image processing device, image processing method and charged particle microscope

Charged particle beam device and aberration correction method for charged particle beam device

SOHDA YASUNARI

Scanning electron microscope

Electron beam device

Scanning electron microscope and inspection method using same

Pattern evaluation method, device therefor, and electron beam device

SEKIGUCHI TOMOKO

Method for estimating shape before shrink and CD-SEM apparatus

OHASHI TAKEYOSHI

Charged particle instrument

ISHIJIMA TATSUAKI

Specimen potential measuring method, and charged particle beam device