Inventor
FENNER DAVID B
US8 patents
⚠️ This page may combine multiple inventors who share the name “FENNER DAVID B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EPION CORP
4 patentsUS6375790B1Apr 23, 2002
Adaptive GCIB for smoothing surfaces
EPION CORP96 citations96
US6537606B2Mar 25, 2003
System and method for improving thin films by gas cluster ion beam processing
EPION CORP65 citations94
US6498107B1Dec 24, 2002
Interface control for film deposition by gas-cluster ion-beam processing
EPION CORP53 citations94
US6805807B2Oct 19, 2004
Adaptive GCIB for smoothing surfaces
EPION CORP9 citations72