Inventor
FERME JEAN-JACQUES
FR4 patents
Patents
4 patentsUS7618149B2Nov 17, 2009
Bimorph mirror with two piezoelectric layers separated by a central core of semirigid material
EUROP DE SYSTEMES OPTIQUES SOC0 citations42
US7377659B2May 27, 2008
Deformable system comprising a parallelepiped-shaped part and an actuator
EUROP DE SYSTEMES OPTIQUES SOC0 citations42
US7090567B2Aug 15, 2006
Method and an element for surface polishing
EUROP DE SYSTEMES OPTIQUES SOC0 citations30
US6428395B1Aug 6, 2002
Method of polishing at least one surface of a silicon-based part
EUROP DE SYSTEMES OPTIQUES SOC0 citations27