Inventor

CORD BERNHARD

DE6 patents

⚠️ This page may combine multiple inventors who share the name “CORD BERNHARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LEYBOLD AG

2 patents

US5970213AOct 19, 1999

Apparatus for heating a transparent substrate utilizing an incandescent lamp and a heating disk emitting infrared wavelengths

LEYBOLD AG8 citations71

US5292394AMar 8, 1994

Apparatus for large-area ionic etching

LEYBOLD AG7 citations69

SINGULUS TECH AG

2 patents

US12196260B2Jan 14, 2025

Treatment machine, drive unit for a treatment machine and use of the treatment machine

SINGULUS TECH AG0 citations54

US11597998B2Mar 7, 2023

Vacuum lock and method for transferring a substrate carrier

SINGULUS TECH AG1 citations53

OC OERLIKON BALZERS AG

1 patent

US7155115B2Dec 26, 2006

Method and device for vacuum sputtering

OC OERLIKON BALZERS AG9 citations70

UNAXIS DEUTSCHLAND GMBH

1 patent

US6579424B2Jun 17, 2003

Method for the production of substrates, magnetron source and sputter-coating chamber

UNAXIS DEUTSCHLAND GMBH4 citations56