Inventor

CARTER FREDERICK M

US4 patents

⚠️ This page may combine multiple inventors who share the name “CARTER FREDERICK M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML HOLDING NV

3 patents

US6906789B2Jun 14, 2005

Magnetically levitated and driven reticle-masking blade stage mechanism having six degrees freedom of motion

ASML HOLDING NV24 citations91

US7372548B2May 13, 2008

Levitated reticle-masking blade stage

ASML HOLDING NV5 citations72

US6950175B2Sep 27, 2005

System, method, and apparatus for a magnetically levitated and driven reticle-masking blade stage mechanism

ASML HOLDING NV5 citations61

ASML HODING N V

1 patent

US7359037B2Apr 15, 2008

Drive for reticle-masking blade stage

ASML HODING N V8 citations68