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Inventor
KINI VIVEKANAND
US
3 patents
⚠️ This page may combine multiple inventors who share the name “KINI VIVEKANAND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
2 patents
US9257260B2
Feb 9, 2016
Method and system for adaptively scanning a sample during electron beam inspection
KLA TENCOR CORP
3 citations
70
US9734987B2
Aug 15, 2017
Method and system for adaptively scanning a sample during electron beam inspection
KLA TENCOR CORP
0 citations
49
KLA TENCOR TECH CORP
1 patent
US7142992B1
Nov 28, 2006
Flexible hybrid defect classification for semiconductor manufacturing
KLA TENCOR TECH CORP
28 citations
89