Inventor

NISHIDA WATARU

JP3 patents

⚠️ This page may combine multiple inventors who share the name “NISHIDA WATARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEC INC

1 patent

US7115186B2Oct 3, 2006

Liquid material evaporation apparatus for semiconductor manufacturing

STEC INC10 citations71

PANASONIC CORP

1 patent

US7718926B2May 18, 2010

Film deposition apparatus, film deposition method, monitoring program for film deposition apparatus, and recording medium thereof

PANASONIC CORP7 citations64

AGC INC

1 patent

US12105412B2Oct 1, 2024

Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask

AGC INC0 citations59