Inventor
MATSUMURA TAMIO
JP8 patents
⚠️ This page may combine multiple inventors who share the name “MATSUMURA TAMIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
5 patentsUS9659808B2May 23, 2017
Semiconductor-element manufacturing method and wafer mounting device using a vacuum end-effector
MITSUBISHI ELECTRIC CORP3 citations69
US6595428B2Jul 22, 2003
Process control device and process control method using a medium with rewritable marking technique
MITSUBISHI ELECTRIC CORP4 citations61
US10882141B2Jan 5, 2021
Substrate suction stage, substrate treatment apparatus, and substrate treatment method
MITSUBISHI ELECTRIC CORP1 citations59
US10134598B2Nov 20, 2018
Method for manufacturing semiconductor device
MITSUBISHI ELECTRIC CORP0 citations48
US11389898B2Jul 19, 2022
Laser processing apparatus, laser processing method, and method for manufacturing semiconductor apparatus
MITSUBISHI ELECTRIC CORP0 citations47