Inventor
STUPIAN GARY W
US3 patents
Patents
3 patentsUS6440637B1Aug 27, 2002
Electron beam lithography method forming nanocrystal shadowmasks and nanometer etch masks
AEROSPACE CORP59 citations92
US5543364AAug 6, 1996
Hydrogen out venting electronic package
AEROSPACE CORP31 citations89
US5491361AFeb 13, 1996
Hydrogen out venting electronic package
AEROSPACE CORP27 citations89