Inventor
RAO RAJASEKHAR M
US7 patents
Patents
7 patentsUS6535531B1Mar 18, 2003
Gas discharge laser with pulse multiplier
CYMER INC166 citations98
US6912052B2Jun 28, 2005
Gas discharge MOPA laser spectral analysis module
CYMER INC22 citations91
US6873418B1Mar 29, 2005
Optical mountings for gas discharge MOPA laser spectral analysis module
CYMER INC14 citations82
US6894785B2May 17, 2005
Gas discharge MOPA laser spectral analysis module
CYMER INC11 citations72
US7292343B2Nov 6, 2007
Gas discharge MOPA laser spectral analysis module
CYMER INC4 citations61
US7852889B2Dec 14, 2010
Active spectral control of DUV light source
CYMER INC3 citations60
US7643528B2Jan 5, 2010
Immersion lithography laser light source with pulse stretcher
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