Inventor
CORMONT PHILIPPE
FR5 patents
⚠️ This page may combine multiple inventors who share the name “CORMONT PHILIPPE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
COMMISSARIAT ENERGIE ATOMIQUE
3 patentsUS7399981B2Jul 15, 2008
Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography
COMMISSARIAT ENERGIE ATOMIQUE20 citations81
US7480030B2Jan 20, 2009
Method and device for lithography by extreme ultraviolet radiation
COMMISSARIAT ENERGIE ATOMIQUE5 citations58
US11084755B2Aug 10, 2021
Method for improving the resistance to laser flux of an optical component
COMMISSARIAT ENERGIE ATOMIQUE0 citations52