Inventor

KAELBERER ARND

DE20 patents

⚠️ This page may combine multiple inventors who share the name “KAELBERER ARND”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAELBERER ARND

BOSCH GMBH ROBERT

Micromechanical pressure sensor device and corresponding manufacturing method

Micromechanical pressure sensor device and corresponding manufacturing method

Micromechanical component and method for manufacturing a micromechanical component

Micromechanical component and manufacturing method

Micromechanical system including a suspension and an electrode positioned movably

Pivot apparatus for a micromirror, and illumination apparatus having a pivot apparatus for a micromirror

Micromechanical sensor device

Micromechanical sensor device

Device made of single-crystal silicon

Micromechanical switch

Method for producing a multilayer MEMS component, and corresponding multilayer MEMS component

Etching device and etching method

Micromechanical component

Method for manufacturing microelectromechanical structures in a layer sequence and a corresponding electronic component having a microelectromechanical structure

CLASSEN JOHANNES

Triaxial acceleration sensor

Method for determining the sensitivity of an acceleration sensor or magnetic field sensor

Acceleration sensor and method for its manufacture

KAELBERER ARND

Micromechanical component and manufacturing method for a micromechanical component

Device made of single-crystal silicon

Acceleration sensor having an electrode bridge