Inventor

HA JEONG SU

KR4 patents

Patents

4 patents

US10724967B2Jul 28, 2020

Inspection apparatus for semiconductor process and semiconductor process device

SAMSUNG ELECTRONICS CO LTD1 citations58

US7362123B2Apr 22, 2008

Inspection apparatus for thin film transistor substrate

SAMSUNG ELECTRONICS CO LTD2 citations57

US10199282B2Feb 5, 2019

Inspection apparatus and method of manufacturing semiconductor device using the same

SAMSUNG ELECTRONICS CO LTD0 citations47

US7488936B2Feb 10, 2009

TFT array inspecting apparatus

SAMSUNG ELECTRONICS CO LTD0 citations46