Inventor

AZUMAYA YOSHIKAZU

JP3 patents

Patents

3 patents

US10312057B2Jun 4, 2019

Plasma processing apparatus

TOKYO ELECTRON LTD1 citations59

US10923323B2Feb 16, 2021

Plasma generating unit and plasma processing apparatus

TOKYO ELECTRON LTD0 citations57

US11056318B2Jul 6, 2021

Plasma processing apparatus

TOKYO ELECTRON LTD0 citations41