Inventor
TERAMOTO TAKASHI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TERAMOTO TAKASHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
2 patentsAIR LIQUIDE
2 patentsUS10529581B2Jan 7, 2020
SiN selective etch to SiO2 with non-plasma dry process for 3D NAND device applications
AIR LIQUIDE9 citations82
US12497691B2Dec 16, 2025
Devices having a rare earth (oxy) fluoride coating for improved resistance to corrosive chemical environments and methods for making and using these devices
AIR LIQUIDE0 citations60