Inventor
UKAI KATSUMI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “UKAI KATSUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ANELVA CORP
5 patentsUS4816638AMar 28, 1989
Vacuum processing apparatus
ANELVA CORP335 citations98
US4950956AAug 21, 1990
Plasma processing apparatus
ANELVA CORP71 citations94
US4482419ANov 13, 1984
Dry etching apparatus comprising etching chambers of different etching rate distributions
ANELVA CORP71 citations93
US4405989ASep 20, 1983
Spectral monitoring device for both plasma etching and sputtering
ANELVA CORP20 citations72
US4376692AMar 15, 1983
Dry etching device comprising a member for bringing a specimen into electrical contact with a grounded electrode
ANELVA CORP14 citations72