P

Inventor

YANG YUEH-LIN

TW40 patents
⚠️ This page may combine multiple inventors who share the name “YANG YUEH-LIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG CO LTD

23 patents
US11448955B2Sep 20, 2022

Mask for lithography process and method for manufacturing the same

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US11243478B2Feb 8, 2022

System and method for thermal management of reticle in semiconductor manufacturing

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US11056371B2Jul 6, 2021

Tool and method for cleaning electrostatic chuck

TAIWAN SEMICONDUCTOR MFG CO LTD1 citations73
US11003087B2May 11, 2021

Radiation source supply system for lithographic tools

TAIWAN SEMICONDUCTOR MFG CO LTD2 citations73
US10514607B1Dec 24, 2019

Radiation source supply system for lithographic tools

TAIWAN SEMICONDUCTOR MFG CO LTD3 citations73
US12347716B2Jul 1, 2025

Method for cleaning electrostatic chuck

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12170218B2Dec 17, 2024

Method for cleaning electrostatic chuck

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12066756B2Aug 20, 2024

Method for lithography process

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11914302B2Feb 27, 2024

Method and apparatus for controlling droplet in extreme ultraviolet light source

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11899377B2Feb 13, 2024

System and method for thermal management of reticle in semiconductor manufacturing

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11809084B2Nov 7, 2023

Radiation source supply system for lithographic tools

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11508602B2Nov 22, 2022

Cleaning tool

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11435669B2Sep 6, 2022

Radiation source supply system for lithographic tools

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11256181B2Feb 22, 2022

Apparatus and method for removing particles in semiconductor manufacturing

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11237483B2Feb 1, 2022

Method and apparatus for controlling droplet in extreme ultraviolet light source

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11221563B2Jan 11, 2022

Lens control for lithography tools

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12368066B2Jul 22, 2025

System and method for correcting non-ideal wafer topography

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11367644B2Jun 21, 2022

System and method for correcting non-ideal wafer topography

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12027407B2Jul 2, 2024

Substrate support apparatus and method

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US11287751B2Mar 29, 2022

System and method for lens heating control

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10845717B2Nov 24, 2020

Lens control for lithography tools

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10627727B2Apr 21, 2020

Lens control for lithography tools

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations52
US10770327B2Sep 8, 2020

System and method for correcting non-ideal wafer topography

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations49

TOPCONN ELECTRONIC KUNSHAN CO LTD

5 patents

PARADE TECH LTD

4 patents

STARCONN ELECTRONIC SU ZHOU CO LTD

3 patents

CHIEF LAND ELECTRONIC CO LTD

3 patents

STARCONN ELECTRONICS SU ZHOU CO LTD

1 patent

WISEPAL TECHNOLOGIES INC

1 patent