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Inventor
JOYCE PATRICK C
US
3 patents
⚠️ This page may combine multiple inventors who share the name “JOYCE PATRICK C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
2 patents
US6764552B1
Jul 20, 2004
Supercritical solutions for cleaning photoresist and post-etch residue from low-k materials
NOVELLUS SYSTEMS INC
149 citations
95
US6905556B1
Jun 14, 2005
Method and apparatus for using surfactants in supercritical fluid processing of wafers
NOVELLUS SYSTEMS INC
19 citations
82
CLOROX CO
1 patent
US7309418B2
Dec 18, 2007
Water contaminant indicators
CLOROX CO
31 citations
89