Inventor

LEVITIN GALIT

US2 patents

⚠️ This page may combine multiple inventors who share the name “LEVITIN GALIT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

1 patent

US6764552B1Jul 20, 2004

Supercritical solutions for cleaning photoresist and post-etch residue from low-k materials

NOVELLUS SYSTEMS INC149 citations95

WU FANGYU

1 patent

US8679359B2Mar 25, 2014

Low temperature metal etching and patterning

WU FANGYU4 citations64