Inventor
IGUCHI YASUHITO
JP5 patents
Patents
5 patentsUS9664733B2May 30, 2017
Probe device for testing electrical characteristics of semiconductor element
TOKYO SEIMITSU CO LTD3 citations71
US9442156B2Sep 13, 2016
Alignment support device and alignment support method for probe device
TOKYO SEIMITSU CO LTD2 citations60
US10481177B2Nov 19, 2019
Wafer inspection method
TOKYO SEIMITSU CO LTD1 citations56
US9983256B2May 29, 2018
Probing device for electronic device and probing method
TOKYO SEIMITSU CO LTD0 citations46
US12282061B2Apr 22, 2025
Wafer test system, probe card replacing method, and prober
TOKYO SEIMITSU CO LTD0 citations44