Inventor
ZABERCHIK MORAN
IL4 patents
⚠️ This page may combine multiple inventors who share the name “ZABERCHIK MORAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
3 patentsUS10622238B2Apr 14, 2020
Overlay measurement using phase and amplitude modeling
KLA TENCOR CORP4 citations70
US12347706B2Jul 1, 2025
Method for measuring and correcting misregistration between layers in a semiconductor device, and misregistration targets useful therein
KLA TENCOR CORP0 citations59
US11302544B2Apr 12, 2022
Method for measuring and correcting misregistration between layers in a semiconductor device, and misregistration targets useful therein
KLA TENCOR CORP0 citations59