Inventor
LANE STEVEN
US46 patents
⚠️ This page may combine multiple inventors who share the name “LANE STEVEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
27 patentsUS10707086B2Jul 7, 2020
Etching methods
APPLIED MATERIALS INC40 citations93
US8734664B2May 27, 2014
Method of differential counter electrode tuning in an RF plasma reactor
APPLIED MATERIALS INC28 citations92
US11651966B2May 16, 2023
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC6 citations85
US10544505B2Jan 28, 2020
Deposition or treatment of diamond-like carbon in a plasma reactor
APPLIED MATERIALS INC12 citations85
US10249495B2Apr 2, 2019
Diamond like carbon layer formed by an electron beam plasma process
APPLIED MATERIALS INC17 citations85
US9613783B2Apr 4, 2017
Method and apparatus for controlling a magnetic field in a plasma chamber
APPLIED MATERIALS INC7 citations84
US11043387B2Jun 22, 2021
Methods and apparatus for processing a substrate
APPLIED MATERIALS INC2 citations73
US10957518B2Mar 23, 2021
Chamber with individually controllable plasma generation regions for a reactor for processing a workpiece
APPLIED MATERIALS INC4 citations73
US10153139B2Dec 11, 2018
Multiple electrode substrate support assembly and phase control system
APPLIED MATERIALS INC2 citations73
US10115566B2Oct 30, 2018
Method and apparatus for controlling a magnetic field in a plasma chamber
APPLIED MATERIALS INC4 citations73
US10017857B2Jul 10, 2018
Method and apparatus for controlling plasma near the edge of a substrate
APPLIED MATERIALS INC4 citations73
US9564297B2Feb 7, 2017
Electron beam plasma source with remote radical source
APPLIED MATERIALS INC6 citations73
US9449794B2Sep 20, 2016
Symmetrical inductively coupled plasma source with side RF feeds and spiral coil antenna
APPLIED MATERIALS INC5 citations73
US9443700B2Sep 13, 2016
Electron beam plasma source with segmented suppression electrode for uniform plasma generation
APPLIED MATERIALS INC6 citations73
US9111722B2Aug 18, 2015
Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator
APPLIED MATERIALS INC6 citations73
US9082591B2Jul 14, 2015
Three-coil inductively coupled plasma source with individually controlled coil currents from a single RF power generator
APPLIED MATERIALS INC4 citations73
US11043375B2Jun 22, 2021
Plasma deposition of carbon hardmask
APPLIED MATERIALS INC4 citations72
US10784085B2Sep 22, 2020
Plasma processing reactor with a magnetic electron-blocking filter external of the chamber and uniform field within the chamber
APPLIED MATERIALS INC1 citations63
US10395904B2Aug 27, 2019
Method of real time in-situ chamber condition monitoring using sensors and RF communication
APPLIED MATERIALS INC0 citations52
US10141166B2Nov 27, 2018
Method of real time in-situ chamber condition monitoring using sensors and RF communication
APPLIED MATERIALS INC0 citations52
US9472379B2Oct 18, 2016
Method of multiple zone symmetric gas injection for inductively coupled plasma
APPLIED MATERIALS INC0 citations52
US9412563B2Aug 9, 2016
Spatially discrete multi-loop RF-driven plasma source having plural independent zones
APPLIED MATERIALS INC0 citations52
US10790153B2Sep 29, 2020
Methods and apparatus for electron beam etching process
APPLIED MATERIALS INC0 citations51
US10249479B2Apr 2, 2019
Magnet configurations for radial uniformity tuning of ICP plasmas
APPLIED MATERIALS INC0 citations49
US10170278B2Jan 1, 2019
Inductively coupled plasma source
APPLIED MATERIALS INC0 citations42
US9721760B2Aug 1, 2017
Electron beam plasma source with reduced metal contamination
APPLIED MATERIALS INC0 citations42
US9659751B2May 23, 2017
System and method for selective coil excitation in inductively coupled plasma processing reactors
APPLIED MATERIALS INC0 citations41
BELKIN INTERNATIONAL INC
14 patentsUSD812063SMar 6, 2018
Overlay
BELKIN INTERNATIONAL INC43 citations98
USD781861SMar 21, 2017
Overlay
BELKIN INTERNATIONAL INC58 citations98
USD751557SMar 15, 2016
Overlay
BELKIN INTERNATIONAL INC64 citations98
US10065365B2Sep 4, 2018
Particle removal device and method of using the same
BELKIN INTERNATIONAL INC18 citations94
USD593034SMay 26, 2009
Cable management device
BELKIN INTERNATIONAL INC27 citations92
USD576166SSep 2, 2008
Stackable hub with cable management feature
BELKIN INTERNATIONAL INC32 citations92
US12005628B2Jun 11, 2024
Overlay applicator machines and methods of providing the same
BELKIN INTERNATIONAL INC7 citations84
US8014170B2Sep 6, 2011
Cable management device and method of cable management
BELKIN INTERNATIONAL INC15 citations84
US9454183B2Sep 27, 2016
Adjustable docking stand and method of providing and using the same
BELKIN INTERNATIONAL INC11 citations82
US11420381B2Aug 23, 2022
Overlay applicator machine and method of providing the same
BELKIN INTERNATIONAL INC4 citations73
US9829918B2Nov 28, 2017
Adjustable docking stand
BELKIN INTERNATIONAL INC2 citations71
US12415310B2Sep 16, 2025
Overlay applicator machines and methods of providing the same
BELKIN INTERNATIONAL INC0 citations61
US12415309B2Sep 16, 2025
Overlay applicator machines and methods of providing the same
BELKIN INTERNATIONAL INC0 citations61
US12515123B2Jan 6, 2026
Game controller system and related methods
BELKIN INTERNATIONAL INC0 citations48